ME-GY 7963 Design and Simulation of Microelectromechanical Systems

3 Credits

This course presents the fundamentals of fabrication, modeling, analysis, and design of micro/nano sensors and actuators. Students will be exposed to the state of the art of micro/nano fabrication. They will gain familiarity with multiphysics phenomena at the micro/nano scale toward an improved understanding of fundamental sensing and actuation principles. Such knowledge will, in turn, inform the use of commercial software to design and simulate micro/nano devices for real world application.