2013-2014 Undergraduate and Graduate Catalog (without addenda) 
    
    Apr 23, 2024  
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2013-2014 Undergraduate and Graduate Catalog (without addenda) [ARCHIVED CATALOG]

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ME 5653 Microelectromechanical Systems

3 Credits
The course covers materials for MEMS, fundamentals of solid mechanics, electrostatics and electromagnetics. Topics: Electromechanical modeling and design of micromachined sensors and actuators. Microscale physics of microsystems. Overview of MEMS applications. Packaging and testing.

Prerequisite(s): Adviser approval.
Weekly Lecture Hours: 3 | Weekly Lab Hours: 0 | Weekly Recitation Hours: 0


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