2022-2023 Undergraduate and Graduate Bulletin (with addenda) 
    
    Dec 22, 2024  
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2022-2023 Undergraduate and Graduate Bulletin (with addenda)
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ME-GY 5653 Microelectromechanical Systems

3 Credits
The course covers materials for MEMS, fundamentals of solid mechanics, electrostatics and electromagnetics. Topics: Electromechanical modeling and design of micromachined sensors and actuators. Microscale physics of microsystems. Overview of MEMS applications. Packaging and testing.

Prerequisite(s): Adviser approval.
Weekly Lecture Hours: 3 | Weekly Lab Hours: 0 | Weekly Recitation Hours: 0


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