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Mar 10, 2025
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2014-2016 Undergraduate and Graduate Bulletin (without addenda) [ARCHIVED CATALOG]
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ME-GY 5653 Microelectromechanical Systems3 Credits
The course covers materials for MEMS, fundamentals of solid mechanics, electrostatics and electromagnetics. Topics: Electromechanical modeling and design of micromachined sensors and actuators. Microscale physics of microsystems. Overview of MEMS applications. Packaging and testing.
Prerequisite(s): Adviser approval.
Weekly Lecture Hours: 3 | Weekly Lab Hours: 0 | Weekly Recitation Hours: 0
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